Goniometers [based on T.Ishikawa
et al., Rev. Sci. Istrum. 73, 1015-1018 (1992)]
theta goniometer
1 arcsec / 200 pulse (half step) [300 - 3000
pps]
(encoder:ROD-800, BL mono.:ERO-725)
coaxis theta goniometer
1 arcsec / 400 pulse (half step) [300 - 3000
pps]
two axis theta goniometer
1 arcsec / 200 pulse (half step) [300
- 3000 pps]
omega-theta goniometer
omega : 1 degree / 10000 pulse (half step)
[500 - 5000 pps]
theta : 1 degree / 5000 pulse (half step)
[500 - 5000 pps]
chi-phi goniometer
chi : 1 degree / 1000 pulse (half step)
[300 - 2000 pps]
phi : 1degree / 40000 pulse (half step)
[500 - 5000 pps]
Stages
chi-phi stage (axis orientation ajustment stage)
chi : 0.6 arcsec / 1 pulse (half step)
[300 - 2000 pps]
phi : 0.06 arcsec / 1 pulse (half step)
[300 - 2000 pps]
swivel stage
SA07-01 : 0.000765 degree
/ 1 pulse (half step) [500 pps]
SA07-02 : 0.0006 degree
/ 1 pulse (half step) [500 pps]
SA10-01 : 0.0011 degree
/ 1 pulse (half step) [500 pps]
SA10-02 : 0.00084 degree / 1 pulse (half step)
[500 pps]
x stage
XA10-12 : 1 mm / 2000
pulse (half step) [500 pps]
z stage
phi stage
Others
4-jaw-slit : 1 mm / 4000 pulse (half step)
for each blade [500 pps]
